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๋ณผํŠธ EUV ์ „๊ธฐ์ฐจ (1)

์‰๋ณด๋ ˆ๋ณผํŠธEUV ์ถœ์‹œ ๊ณต์‹์˜์ƒ

์‰๋ณด๋ ˆ EUV ๊ณต์‹ ์˜์ƒ (์•„๋ž˜) แ„‰แ…ฐแ„‡แ…ฉแ„…แ…ฆ แ„‡แ…ฉแ†ฏแ„แ…ณ EUV ์‰๋ณด๋ ˆ EUV ๋””์ž์ธ ์‰๋ณด๋ ˆ ๋ณผํŠธ ํ’€์˜ต์…˜ ๊ธฐ์ค€ ์ŠคํŽ™ ๋ฐ ๊ฐ€๊ฒฉ

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